Modern and flexible solution for plasma analysis and plasma process control.
Insoptics PEM automatically defines plasma spectral lines of different elements and molecules. Unique diagram designer helps to set up feedback loops using lines intensity data or analog inputs. Diagrams supply dozens of mathematical functions, which easily transform data into monitoring trends.
You can customize Insoptics PEM to make a multi-point measurement from a single vacuum chamber or it can be installed on multiple chambers and receive data from different points independently. Optimized spectrometer poll allows simultaneously receive data from 16 spectrometers at the same time in the range from 200-1100 nm.
All-on-one design helps to save time during installation. The main unit has all the required interfaces to integrate into plasma process equipment. A variety of high-speed IOs can be plug in seconds using high-quality connectors.
High precision optics minimize intensity losses and increase data rates to make ultimately reliable control. Optional vacuum collimators prevent optical surface contamination during the plasma processes.